Choosing a Control Method for a Wafer Heater in Automated Equipment

https://telegra.ph/How-a-Kapton-Heater-Supports-Fast-and-Controlled-Thermal-Response-09-22

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result